Graphite Components for Semiconductor Industry

• Type: Graphtie Parts
• Composition: Carbon
• Carbon Content: High-Carbon
• Grade: Industrial Grade
• Forming Way: Isostatic Graphite
• Density: 1.85 g/cm3
• Model NO.: HBHTSEM008
• Specific Resistance: No More Than 8.5
• Compressive Strenght: 34 MPa Min
• Shape: Cuistomized
• Material: Purified Graphite
• Transport Package: Wooden Case
• Specification: Customized
• Origin: Hebei, China
• Production Capacity: 500000 Piece/Pieces Per Month

Product Description

 Semiconductor

Semiconductor refers to the material whose conductivity is between conductor and insulator at normal temperature. Semiconductors are used in integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting, high-power power conversion, and other fields. For example, diodes are devices made of semiconductors. From the perspective of technology or economic development, the importance of semiconductors is very large.
 

About Ion Implantation Introduction

Ion implantation is a complex and sensitive process and is used in the manufacture of semiconductors. During the implantation process, dopant ions are accelerated and implanted into a monocrystalline silicon substrate to manipulate its bulk properties. Boron, phosphorous and germanium are some of the typical dopant materials.Implanter systems dope wafers with foreign atoms to modify material properties such as conductivity or crystal structure. The beam path is the center of an implanter system. Here the ions are generated, concentrated, greatly accelerated, and focused on the wafer at very high speeds.
 

 

Ion Implantation Components Key Features:
Material Compatibility: Ion implantation components are crafted from materials with high purity, excellent thermal conductivity, and resistance to harsh environments.
Precision Design: Components are meticulously engineered to ensure accurate beam alignment, uniform dose distribution, and minimal scattering effects.
Wear Resistance: Ion implantation components are coated or treated to enhance wear resistance and minimize particle generation, prolonging their operational lifespan.
Temperature Control: Efficient heat dissipation methods are integrated to maintain temperature stability during ion implantation processes, ensuring consistent results.
Customization: Ion implantation components are designed to match specific equipment
 

 

Ideal product properties
Temperatures up to 1400°C, strong electro-magnetic fields, aggressive process gases, and high mechanical forces are a problem for regular materials. Not so with our products. Our heat resistant components made from graphite offer the ideal combination of corrosion resistance, material strength, good thermal conductivity, and absolute purity. They ensure that the ions are generated efficiently and are focused precisely on the wafer in the beam path without any impurities. Our components and spare parts made from graphite help to ensure that this process is as efficient, precise, and free of impurities as possible.
 

Advanced Equipments: 
 

 

Graphtie Material Property: 

Property (Typical Value)	TSK	GSK	Unit
Apparent Density	≥1.68	≥1.72	g/cm^3
Max Grain Size	≤2	≤0.8	mm
Specific Electrical Resistivity	8-10	≤8.5	μΩm
Flexural Strength	≥12.5	≥15	Mpa
Compressive Strength	≥28	≥35	Mpa
Porosity	≤24	≤20	%
Ash value	≤0.3	≤0.3	%

 

Property (Typical Value)	HTG-4	HTG-5	Unit
Apparent Density	≥1.78	≥1.85	g/cm^3
Max Grain Size	≤43	≤43	µm
Ash value	≤500	≤500	ppm
Specific Electrical Resistivity	≤12	≤10	μΩm
Flexural Strength	≥35	≥40	Mpa
Compressive Strength	≥60	≥70	Mpa
Shore Hardness	≥40	≥45	HSD
Thermal Expansion (room temperature to 600ºC)	≤4.5	≤4.4	10-6/ºC

 

Property (Typical Value)	HTD-5	HTD-6	HTD-7	HTD-8	HTD-9	Unit
Apparent Density	1.85	1.90	1.82	1.90	1.82	g/cm^3
Max Grain Size	13-15	8-10	8-10	8-10		µm
Ash Content	≤500	≤500	≤500	≤500	≤500	ppm
Purified ASH Content	50	50	50	50	50	ppm
Specific Electrical Resistivity	8-10	8-9	11-13	11-13	11-13	μΩm
Flexural Strength	46	55	51	60	59	Mpa
Compressive Strength	85	95	115	135	121	Mpa
Shore Hardness	48	53	65	70	70	HSD
Thermal Expansion (room temperature to 600ºC)	4.75	4.8	5.8	5.85	5.85	10-6/ºC

 

Property	HCT-Z	Unit
Apparent Density	1.90	g/cm^3
Average Grain Size	3	µm
Ash value	≤20	ppm
Specific Electrical Resistivity	14	μΩm
Flexural Strength	85	Mpa
Compressive Strength	150	Mpa
Shore Hardness	80	HSD

Our Services:

Efficiency: Your einquiry will be replied with 24 hours 

Fast Delivery: Our produciton capability and enough mateiral stocks will make sure fast devevery
Customization: We provided OEM services based on your design and drawings

Design Service: Our professional and experienced enigneers team can disign for you, if you need
Quality and Price: We offer you high quality graphite products with the most competitive price

After-sales Services: Tracking service for feedbacks of our graphite products, and we will be responsilbe for quality problem.  

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